JPH0469767U - - Google Patents

Info

Publication number
JPH0469767U
JPH0469767U JP11186190U JP11186190U JPH0469767U JP H0469767 U JPH0469767 U JP H0469767U JP 11186190 U JP11186190 U JP 11186190U JP 11186190 U JP11186190 U JP 11186190U JP H0469767 U JPH0469767 U JP H0469767U
Authority
JP
Japan
Prior art keywords
probe
contact pressure
probed
pressure sensing
support shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11186190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11186190U priority Critical patent/JPH0469767U/ja
Publication of JPH0469767U publication Critical patent/JPH0469767U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
JP11186190U 1990-10-25 1990-10-25 Pending JPH0469767U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11186190U JPH0469767U (en]) 1990-10-25 1990-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11186190U JPH0469767U (en]) 1990-10-25 1990-10-25

Publications (1)

Publication Number Publication Date
JPH0469767U true JPH0469767U (en]) 1992-06-19

Family

ID=31859344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11186190U Pending JPH0469767U (en]) 1990-10-25 1990-10-25

Country Status (1)

Country Link
JP (1) JPH0469767U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06102302A (ja) * 1992-09-18 1994-04-15 Fujitsu Ltd 薄膜基板の試験装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06102302A (ja) * 1992-09-18 1994-04-15 Fujitsu Ltd 薄膜基板の試験装置

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